HBO Microlithography Lamps for Canon i-line Systems

Product features and benefits
  • High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
  • Designed for long lasting performance
  • Qualified with Canon
Areas of application
  • Microlithography
Safety advice
Because of their high luminance, UV radiation and high internal pressure (when hot) HBO lamps may only be operated in enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the operating instructions.

Information about Family

HBO lamps > 200W are designed to meet the high demands of the Semiconductor industry. With peak intensity at 365nm these lamps are ideal for microlithography and are designed and qualified for specific equipment manufacturers.

Products

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Product
Product number (Americas)
Nominal wattage
Nominal voltage
Light center length (LCL)
Length
Data sheet
HBO 1002W/CEL 1/CS 1/SKU
69177 750 W 47.0 V 78.5 mm 175.0 mm
HBO 1500W/CIEL 6/CS 1/SKU
69171 1500 W 23.0 V 122.0 mm 262.0 mm
HBO 2001W/CIEL 4/CS 1/SKU
69166 2000 W 26.0 V 148.75 mm 327.0 mm
HBO 2002W/37V/MA 4/CS 1/SKU
69199 2000 W 37.0 V 138.5 mm 270.0 mm
HBO 2001W/CIL 4/CS 1/SKU
69189 2000 W 26 V 309.0 mm
HBO 2700W/24V/CIL 1/CS 1/SKU
69344 2700 W 26.0 V 149.1 mm 332.0 mm
HBO 4500W/30V/CIL 4/CS 1/SKU
69162 4500 W 30 V 157.75 mm 354.0 mm

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